Enchanced diffusion of arsenic along misfit dislocation in epitaxial 'SI' / 'SI' (Ge ) (1993)
- Authors:
- Autor USP: BRAGA, NELSON LIEBENTRITT DE ALMEIDA - EP
- Unidade: EP
- Assunto: CIRCUITOS INTEGRADOS
- Language: Inglês
- Imprenta:
- Publisher: Electrochemical Society
- Publisher place: Pennington
- Date published: 1993
- Source:
- Título do periódico: Extended Abstracts
- Conference titles: Fall Meeting of the Electrochemical Society
-
ABNT
BRAGA, Nelson Liebentritt de Almeida e BUCZKOWSKI, A e ROSGONYI, G A. Enchanced diffusion of arsenic along misfit dislocation in epitaxial 'SI' / 'SI' (Ge ). 1993, Anais.. Pennington: Electrochemical Society, 1993. . Acesso em: 27 maio 2024. -
APA
Braga, N. L. de A., Buczkowski, A., & Rosgonyi, G. A. (1993). Enchanced diffusion of arsenic along misfit dislocation in epitaxial 'SI' / 'SI' (Ge ). In Extended Abstracts. Pennington: Electrochemical Society. -
NLM
Braga NL de A, Buczkowski A, Rosgonyi GA. Enchanced diffusion of arsenic along misfit dislocation in epitaxial 'SI' / 'SI' (Ge ). Extended Abstracts. 1993 ;[citado 2024 maio 27 ] -
Vancouver
Braga NL de A, Buczkowski A, Rosgonyi GA. Enchanced diffusion of arsenic along misfit dislocation in epitaxial 'SI' / 'SI' (Ge ). Extended Abstracts. 1993 ;[citado 2024 maio 27 ] - Analysis of process parameters in "Smart cut" SOI structure fabrication
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