Fabrication of PMMA microlenses using a micromachined silicon moud (2002)
- Authors:
- USP affiliated authors: MANSANO, RONALDO DOMINGUES - EP ; VERDONCK, PATRICK BERNARD - EP ; GONCALVES NETO, LUIZ - EESC
- Unidades: EP; EESC
- Assunto: MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2002
- ISBN: 1-56677-328-8
- Source:
- Título do periódico: Microelectronics Technology and Devices SBMICRO 2002
-
ABNT
CIRINO, Giuseppe Antonio et al. Fabrication of PMMA microlenses using a micromachined silicon moud. Microelectronics Technology and Devices SBMICRO 2002. Tradução . Pennington: The Electrochemical Society, 2002. . . Acesso em: 30 abr. 2024. -
APA
Cirino, G. A., Arruda, A. C., Mansano, R. D., Verdonck, P. B., & Gonçalves Neto, L. (2002). Fabrication of PMMA microlenses using a micromachined silicon moud. In Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society. -
NLM
Cirino GA, Arruda AC, Mansano RD, Verdonck PB, Gonçalves Neto L. Fabrication of PMMA microlenses using a micromachined silicon moud. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2024 abr. 30 ] -
Vancouver
Cirino GA, Arruda AC, Mansano RD, Verdonck PB, Gonçalves Neto L. Fabrication of PMMA microlenses using a micromachined silicon moud. In: Microelectronics Technology and Devices SBMICRO 2002. Pennington: The Electrochemical Society; 2002. [citado 2024 abr. 30 ] - Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates
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