Design and fabrication of 'SI'O IND.2'/'SI IND.3''N IND.4' integrated-optics waveguides on silicon substrates (2002)
- Authors:
- USP affiliated authors: BORGES, BEN HUR VIANA - EESC ; ROMERO, MURILO ARAUJO - EESC ; MORIMOTO, NILTON ITIRO - EP
- Unidades: EESC; EP
- Assunto: ÓPTICA ELETRÔNICA
- Language: Inglês
- Imprenta:
- Source:
- Título do periódico: IEEE Transactions on Microwave Theory and Techniques
- Volume/Número/Paginação/Ano: v. 50, n. 1, p. 9-12, Jan. 2002
-
ABNT
BULLA, Douglas Anderson Pereira et al. Design and fabrication of 'SI'O IND.2'/'SI IND.3''N IND.4' integrated-optics waveguides on silicon substrates. IEEE Transactions on Microwave Theory and Techniques, v. 50, n. Ja 2002, p. 9-12, 2002Tradução . . Disponível em: https://repositorio.usp.br/directbitstream/b7c733e0-9e77-435f-b3ff-ebd3e48043cd/PROD_001116_SYSNO_1281942.pdf. Acesso em: 30 abr. 2024. -
APA
Bulla, D. A. P., Borges, B. -H. V., Romero, M. A., Morimoto, N. I., & Gonçalves Neto, L. (2002). Design and fabrication of 'SI'O IND.2'/'SI IND.3''N IND.4' integrated-optics waveguides on silicon substrates. IEEE Transactions on Microwave Theory and Techniques, 50( Ja 2002), 9-12. Recuperado de https://repositorio.usp.br/directbitstream/b7c733e0-9e77-435f-b3ff-ebd3e48043cd/PROD_001116_SYSNO_1281942.pdf -
NLM
Bulla DAP, Borges B-HV, Romero MA, Morimoto NI, Gonçalves Neto L. Design and fabrication of 'SI'O IND.2'/'SI IND.3''N IND.4' integrated-optics waveguides on silicon substrates [Internet]. IEEE Transactions on Microwave Theory and Techniques. 2002 ; 50( Ja 2002): 9-12.[citado 2024 abr. 30 ] Available from: https://repositorio.usp.br/directbitstream/b7c733e0-9e77-435f-b3ff-ebd3e48043cd/PROD_001116_SYSNO_1281942.pdf -
Vancouver
Bulla DAP, Borges B-HV, Romero MA, Morimoto NI, Gonçalves Neto L. Design and fabrication of 'SI'O IND.2'/'SI IND.3''N IND.4' integrated-optics waveguides on silicon substrates [Internet]. IEEE Transactions on Microwave Theory and Techniques. 2002 ; 50( Ja 2002): 9-12.[citado 2024 abr. 30 ] Available from: https://repositorio.usp.br/directbitstream/b7c733e0-9e77-435f-b3ff-ebd3e48043cd/PROD_001116_SYSNO_1281942.pdf - Design and fabrication of 'SI IND.2''O IND. 2'/'SI IND.3''N IND.4' CVD optical waveguides
- Method to obtain TEOS PECVD silicon oxide thick layers for optoelectronics devices applications. (em CD-Rom)
- Mach-zehnder interferometer simulation results for integrated optical pressure sensor
- Study of nickel silicide as mask for alkaline solutions to V-grooves fabrication
- Caracterização de filmes finos de siliceto de titanio por técnicas de difração de Raio X
- Caracterizacao de oxido de silicio nao dopado depositados por pecvd
- Electrical characteristics of PECVD silicon oxide deposited with low TEOS contents at low temperatures
- Development of a low temperature N and P type fabrication process by LPCVD and SPC techniques
- Desenvolvimento de um sistema multicâmara integrado para deposição e recozimento de filmes 'SI''O IND.2'
- Semiconductor light emitting diodes: an empirical study for use in fiber optic gyroscopes
Download do texto completo
| Tipo | Nome | Link | |
|---|---|---|---|
 | PROD_001116_SYSNO_1281942... |
How to cite
A citação é gerada automaticamente e pode não estar totalmente de acordo com as normas
