Electrochemical process for MEMS fabrication (2002)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMÍREZ - EP
- Unidade: EP
- Assunto: SENSORES ELETROMECÂNICOS
- Language: Inglês
- Imprenta:
- Publisher: Pontifícia Universidad Católica del Perú
- Publisher place: Lima
- Date published: 2002
- Source:
- Título do periódico: IBERSENSOR 2002
- Conference titles: Congreso Iberoamericano de Sensores y Biosensores
-
ABNT
DANTAS, Michel Oliveira da Silva et al. Electrochemical process for MEMS fabrication. 2002, Anais.. Lima: Pontifícia Universidad Católica del Perú, 2002. . Acesso em: 21 maio 2024. -
APA
Dantas, M. O. da S., Galeazzo, E., Peres, H. E. M., & Ramírez Fernandez, F. J. (2002). Electrochemical process for MEMS fabrication. In IBERSENSOR 2002. Lima: Pontifícia Universidad Católica del Perú. -
NLM
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Electrochemical process for MEMS fabrication. IBERSENSOR 2002. 2002 ;[citado 2024 maio 21 ] -
Vancouver
Dantas MO da S, Galeazzo E, Peres HEM, Ramírez Fernandez FJ. Electrochemical process for MEMS fabrication. IBERSENSOR 2002. 2002 ;[citado 2024 maio 21 ] - Porous silicon sacrifical layers applied on micromechanical structures fabrication
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