Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates (2003)
- Authors:
- USP affiliated authors: GONCALVES NETO, LUIZ - EESC ; MANSANO, RONALDO DOMINGUES - EP ; VERDONCK, PATRICK BERNARD - EP
- Unidades: EESC; EP
- Subjects: ÓPTICA ELETRÔNICA; MICROELETRÔNICA
- Language: Inglês
- Imprenta:
- Publisher place: Bellingham
- Date published: 2003
- ISBN: 0277786X
- Source:
- Título do periódico: Proceedings of SPIE
- Volume/Número/Paginação/Ano: v. 4984, p. 18-28, 2003
- Conference titles: Micromachining Technology for Micro-Optics and Nano-Optics
-
ABNT
GONÇALVES NETO, Luiz et al. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. . Acesso em: 01 maio 2024. , 2003 -
APA
Gonçalves Neto, L., Cirino, G. A., Mansano, R. D., Cardona, P. S. P., & Verdonck, P. B. (2003). Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. -
NLM
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2024 maio 01 ] -
Vancouver
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2024 maio 01 ] - Fabrication of PMMA microlenses using a micromachined silicon moud
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