Controlled motion in microbridges of silicon carbide obtained by PECVD (2004)
Source: Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO 2004. Unidade: EP
Subjects: MICROELETRÔNICA, FILMES FINOS, ELETROQUÍMICA
ABNT
REHDER, Gustavo Pamplona e PAEZ CARREÑO, Marcelo Nelson. Controlled motion in microbridges of silicon carbide obtained by PECVD. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 06 jun. 2024.APA
Rehder, G. P., & Paez Carreño, M. N. (2004). Controlled motion in microbridges of silicon carbide obtained by PECVD. In Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society.NLM
Rehder GP, Paez Carreño MN. Controlled motion in microbridges of silicon carbide obtained by PECVD. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2024 jun. 06 ]Vancouver
Rehder GP, Paez Carreño MN. Controlled motion in microbridges of silicon carbide obtained by PECVD. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2024 jun. 06 ]