Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates (2004)
- Authors:
- USP affiliated authors: SANTOS FILHO, SEBASTIAO GOMES DOS - EP ; VALLE, MARCIO DE ALMEIDA - EP
- Unidade: EP
- Subjects: MICROELETRÔNICA; ELETROQUÍMICA; FILMES FINOS
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2004
- ISBN: 1-56677-416-0
- Source:
- Título do periódico: Microelectronics technology and devices SBMicro 2004.
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
ARAÚJO, Hugo Puertas de e SANTOS FILHO, Sebastião Gomes dos e VALLE, Márcio de Almeida. Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 19 abr. 2024. -
APA
Araújo, H. P. de, Santos Filho, S. G. dos, & Valle, M. de A. (2004). Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates. In Microelectronics technology and devices SBMicro 2004.. Pennington: The Electrochemical Society. -
NLM
Araújo HP de, Santos Filho SG dos, Valle M de A. Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates. Microelectronics technology and devices SBMicro 2004. 2004 ;[citado 2024 abr. 19 ] -
Vancouver
Araújo HP de, Santos Filho SG dos, Valle M de A. Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates. Microelectronics technology and devices SBMicro 2004. 2004 ;[citado 2024 abr. 19 ] - Desenvolvimento de tecnologia de fabricacao de circuitos integrados monoliticos de microondas em 'GA''AS'
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