Characteristics of polymcrystalline SI1-xGEx alloy deposited in a vertical LPCVD system (2004)
- Authors:
- Autor USP: SANTOS FILHO, SEBASTIAO GOMES DOS - EP
- Unidade: EP
- Subjects: MICROELETRÔNICA; POLÍMEROS (MATERIAIS)
- Language: Inglês
- Imprenta:
- Publisher: The Electrochemical Society
- Publisher place: Pennington
- Date published: 2004
- ISBN: 1-56677-416-0
- Source:
- Título do periódico: Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03
- Conference titles: International Symposium on Microelectronics Technology and Devices SBMICRO
-
ABNT
TEIXEIRA, Ricardo C. et al. Characteristics of polymcrystalline SI1-xGEx alloy deposited in a vertical LPCVD system. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 24 abr. 2024. -
APA
Teixeira, R. C., Doi, I., Swart, J. W., Zakia, M. B. P., & Santos Filho, S. G. dos. (2004). Characteristics of polymcrystalline SI1-xGEx alloy deposited in a vertical LPCVD system. In Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society. -
NLM
Teixeira RC, Doi I, Swart JW, Zakia MBP, Santos Filho SG dos. Characteristics of polymcrystalline SI1-xGEx alloy deposited in a vertical LPCVD system. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2024 abr. 24 ] -
Vancouver
Teixeira RC, Doi I, Swart JW, Zakia MBP, Santos Filho SG dos. Characteristics of polymcrystalline SI1-xGEx alloy deposited in a vertical LPCVD system. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2024 abr. 24 ] - Potentiostatic electrodeposition of Au-Sn alloys from a non-cyanide bath for soldering: influence of reagents concentrations
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