Investigating the performance of a MEMS capacitive accelerometer using finite element analysis (2011)
- Authors:
- Autor USP: SILVA, EMILIO CARLOS NELLI - EP
- Unidade: EP
- Subjects: SISTEMAS MICROELETROMECÂNICOS (SIMULAÇÃO); MÉTODO DOS ELEMENTOS FINITOS
- Language: Inglês
- Imprenta:
- Publisher: Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM
- Publisher place: Rio de Janeiro
- Date published: 2011
- Source:
- Conference titles: International Congress of Mechanical Engineering - COBEM 2011
-
ABNT
TEVES, André da Costa et al. Investigating the performance of a MEMS capacitive accelerometer using finite element analysis. 2011, Anais.. Rio de Janeiro: Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM, 2011. Disponível em: https://repositorio.usp.br/directbitstream/5dd58e31-3f54-4056-bdf4-d026449b579f/SilvaE-2011-Investigating%20The%20Performance%20of%20a%20MEMS%20Capacitive%20Accelerometer%20Using%20Finite%20Element%20Analysis%20ok.pdf. Acesso em: 28 mar. 2024. -
APA
Teves, A. da C., Rodrigues, J. R., Passaro, A., Silva, E. C. N., Mateus, C. F. R., & Góes, L. C. S. (2011). Investigating the performance of a MEMS capacitive accelerometer using finite element analysis. In Anais. Rio de Janeiro: Associação Brasileira de Engenharia e Ciências Mecânicas - ABCM. Recuperado de https://repositorio.usp.br/directbitstream/5dd58e31-3f54-4056-bdf4-d026449b579f/SilvaE-2011-Investigating%20The%20Performance%20of%20a%20MEMS%20Capacitive%20Accelerometer%20Using%20Finite%20Element%20Analysis%20ok.pdf -
NLM
Teves A da C, Rodrigues JR, Passaro A, Silva ECN, Mateus CFR, Góes LCS. Investigating the performance of a MEMS capacitive accelerometer using finite element analysis [Internet]. Anais. 2011 ;[citado 2024 mar. 28 ] Available from: https://repositorio.usp.br/directbitstream/5dd58e31-3f54-4056-bdf4-d026449b579f/SilvaE-2011-Investigating%20The%20Performance%20of%20a%20MEMS%20Capacitive%20Accelerometer%20Using%20Finite%20Element%20Analysis%20ok.pdf -
Vancouver
Teves A da C, Rodrigues JR, Passaro A, Silva ECN, Mateus CFR, Góes LCS. Investigating the performance of a MEMS capacitive accelerometer using finite element analysis [Internet]. Anais. 2011 ;[citado 2024 mar. 28 ] Available from: https://repositorio.usp.br/directbitstream/5dd58e31-3f54-4056-bdf4-d026449b579f/SilvaE-2011-Investigating%20The%20Performance%20of%20a%20MEMS%20Capacitive%20Accelerometer%20Using%20Finite%20Element%20Analysis%20ok.pdf - Modelagem vibracional de transdutores de ultra-som piezoelétricos pelo método de elementos finitos
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