@inproceedings{inproceedingsdd327170,
title   = {Impact of silicon surface characteristics on gate oxide breakdown characteristics and its correlation with 'SI'o void growth},
author = {Hasenack, Claus Martin and Heyns, M},
year = {1990},
publisher = {Sbmicro/Spie},
booktitle   = {Congresso da Sociedade Brasileira de Microeletronica}
}