@inproceedings{inproceedings17f2e324, title = {Experimental study of lateral growth of titanium silicide}, author = {Oka, Mauricio Massazumi and Swart, Jacobus Willibrordus}, year = {1990}, publisher = {Sbmicro/Spie}, booktitle = {Congresso da Sociedade Brasileira de Microeletronica} }