@inproceedings{inproceedings85839feb, title = {Improved backside hydrogenation on semicrystalline silicon solar cells by rf plasma}, author = {Soler Pajanian, Maria Aparecida Godoy and Pereyra, Inés and Fonseca, Fernando Josepetti and Andrade, Adnei Melges de}, year = {1990}, publisher = {Ieee}, booktitle = {Ieee Photovoltaic Specialists Conference} }