@article{articlef4b8e55b,
title   = {Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition},
author = {Matsuoka, Masao and Isotani, S and Miyake, S and Setsuhara, Y and Ogata, K and Kuratani, N},
year = {1996},
doi = {10.1063/1.362855},
journal   = {Journal of Applied Physics}
}