@article{article1220dc5d,
title   = {Sensitivity Bragg surface diffraction to analyze ion-implanted semiconductors},
author = {Hayashi, M A and Morelhão, Sérgio Luiz and Avanci, L H and Cardoso, L P and Sasaki, J M and Kretly, L C and Chang, S L},
year = {1997},
doi = {10.1063/1.120157},
journal   = {Applied Physics Letters}
}