@inproceedings{inproceedings3c64ec15, title = {A simple silicon based nitric oxide sensor}, author = {Fontes, Marcelo Bariatto Andrade and Furlan, Rogério and Arakai, Koiti and Santiago-Avilés, Jorge Juan}, year = {1999}, publisher = {ASME}, booktitle = {Micro-Electro-Mechanical Systems (MEMS)/ASME International Mechanical Engineering Congress and Exposition} }