TY - JOUR TI - Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering PY - 2000 AU - Mansano, Ronaldo Domingues AU - Massi, Marcos AU - Zambom, Luís da Silva AU - Verdonck, Patrick Bernard AU - Nogueira, P. M. AU - Maciel, H. S. AU - Otani, Choyu T2 - Thin Solid Films SN - 0040-6090 DO - 10.1016/s0040-6090(00)01088-9 UR - https://doi.org/10.1016/s0040-6090(00)01088-9 PP - Lauzanne IS - 373 SP - 243-246 ER -