@inproceedings{inproceedingsa0bbb459,
title   = {Determination of silicon film doping concentration and back interface oxide charge density using SOI-MOS capacitor},
author = {Sonnenberg, Victor and Martino, João Antonio},
year = {2001},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Silicon-on-Insulator Technology and Devices}
}