@article{articled0d116f0,
title   = {Anisotropic reactive ion etching in silicon, using a graphite electrode},
author = {Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Maciel, Homero Santiago},
year = {1998},
doi = {10.1016/s0924-4247(97)01681-6},
journal   = {Sensors and Actuators A}
}