@inbook{inbookc32d343e,
title   = {Implementation of an optical integrated pressure sensor and experimental results},
author = {Siarkowski, Acácio Luiz and Bulla, Douglas Anderson Pereira and Morimoto, Nilton Itiro},
year = {2002},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}