TY - CHAP TI - Implementation of an optical integrated pressure sensor and experimental results PY - 2002 AU - Siarkowski, Acácio Luiz AU - Bulla, Douglas Anderson Pereira AU - Morimoto, Nilton Itiro T2 - International Symposium on Microelectronics Technology and Devices SBMICRO J2 - Microelectronics Technology and Devices SBMICRO 2002 PP - Pennington PB - The Electrochemical Society ER -