@article{article3c18bdfa,
title   = {Structural investigation of Si-rich amorphous silicon oxynitride films},
author = {Scopel, Wanderla Luis and Fantini, Márcia Carvalho de Abreu and Alayo Chávez, Marco Isaías and Pereyra, Inés},
year = {2003},
doi = {10.1016/s0040-6090(02)01053-2},
journal   = {Thin Solids Films}
}