@inproceedings{inproceedingsb717115a,
title   = {Energetic of nitridation processes in 'SiO IND.2'},
author = {Orellana, W and Silva, Antonio Jose Roque da and Fazzio, Adalberto},
year = {2003},
publisher = {DF/UFC},
booktitle   = {Brazilian Workshop on Semiconductor Physics}
}