@inproceedings{inproceedings582dd4ef,
title   = {Study of of the influence of the secondary electron emission coefficient in radio-frequency argonplasmas using particle in cell simulation},
author = {Cizzoto, Elias Rodrigues and Roberto, Marisa and Verdonck, Patrick Bernard and Maciel, Homero Santiago},
year = {2003},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices - SBMICRO}
}