@article{article558487b0, title = {Generation and characterization of polymeric tridimensional microstrucutres for micromachine application}, author = {Mousinho, Ana Paula and Mansano, Ronaldo Domingues and Arruda, Antonio Carlos Santos de}, year = {2003}, doi = {10.1016/s0026-2692(03)00085-5}, journal = {Microelectronics Journal,} }