@inbook{inbook6f9fbfaf,
title   = {Formation of nickel silicides onto (100) silicon wafer surfaces using a thin platinum interlayer},
author = {Reis, Ronaldo Willian and Santos Filho, Sebastião Gomes dos and Doi, Ioshiaki and Swart, Jacobus Willibrordus},
year = {2003},
publisher = {Electrochemical Society},
journal   = {Microelectronic Technology and Devices SBMicro 2003}
}