@inbook{inbook689d4048,
title   = {Influence of RF frequency on production of adsorbent organic films by PECVD},
author = {Nascimento Filho, Antonio Pereira do and Hamanaka, Cristian Otsuka and Jesus, Dosil Pereira de and Silva, Maria Lucia Pereira da and Demarquette, Nicole Raymonde},
year = {2003},
publisher = {Electrochemical Society},
journal   = {Microelectronic Technology and Devices SBMicro 2003}
}