@inbook{inbookb8afe56a,
title   = {Electrochemical process for silicon tips fabrication},
author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier},
year = {2003},
publisher = {Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO 2003, São Paulo /}
}