@misc{misc876a5591,
title   = {Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure},
author = {Capote, G. and Prioli, R. and Jardim, P. M. and Zanatta, Antonio Ricardo and Jacobsohn, L. G. and Freire Junior, F. L.},
year = {2004},
publisher = {Elsevier Science},
booktitle   = {International Conference on Amorphous and Microcrystalline Semiconductors - Science and Technology}
}