@article{article739d3433,
title   = {Structural analysis of silicon oxynitride films deposited by PECVD},
author = {Criado, Denise and Alayo Chávez, Marco Isaías and Pereyra, Inés and Fantini, Márcia Carvalho de Abreu},
year = {2004},
doi = {10.1016/j.mseb.2004.05.017},
journal   = {Materials Science and Engineering B}
}