@inproceedings{inproceedings62c14c99,
title   = {Study of silicon oxynitride films with low mechanical stress},
author = {Criado, Denise and Alayo Chávez, Marco Isaías and Pereyra, Inés and Fantini, Márcia Carvalho de Abreu},
year = {2004},
publisher = {SBPMat},
booktitle   = {Encontro da SBPMat}
}