@inproceedings{inproceedingsa332f831,
title   = {Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates},
author = {Araújo, Hugo Puertas de and Santos Filho, Sebastião Gomes dos and Valle, Márcio de Almeida},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}