@inproceedings{inproceedings616fee62,
title   = {Formation of nickel silicides onto AS-doped silicon using a thin Pt/Pd interlayer},
author = {Reis, Ronaldo Willian and Santos Filho, Sebastião Gomes dos and Doi, Ioshiaki and Swart, Jacobus Willibrordus},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}