@article{articlee1f7975f,
title   = {Structure evaluation of submicrometre silicon chips removed by diamond turning},
author = {Jasinevicius, Renato Goulart and Duduch, Jaime Gilberto and Pizani, Paulo Sérgio},
year = {2007},
doi = {10.1088/0268-1242/22/5/019},
journal   = {Semiconductor Science and Technology}
}