TY - JOUR TI - Structure evaluation of submicrometre silicon chips removed by diamond turning PY - 2007 AU - Jasinevicius, Renato Goulart AU - Duduch, Jaime Gilberto AU - Pizani, Paulo Sérgio T2 - Semiconductor Science and Technology SN - 0268-1242 DO - 10.1088/0268-1242/22/5/019 UR - https://doi.org/10.1088/0268-1242/22/5/019 PP - London VL - 22 IS - 5 SP - 561-573 ER -