@article{article3b9d573c,
title   = {Annealing treatment of amorphous silicon generated by single point diamond turning},
author = {Jasinevicius, Renato Goulart and Pizani, Paulo Sérgio},
year = {2007},
doi = {10.1007/s00170-006-0650-z},
journal   = {International Journal of Advanced Manufacturing Technology}
}