@inproceedings{inproceedings1b8c810d,
title   = {Oxygen plasma etching study for conductor trails},
author = {Moreira, Taís Aparecida de Assis Garcia and Possidonio, Shirley and Wang, Shu Hui and Onmori, Roberto Koji},
year = {2006},
publisher = {Instituto de Pesquisas Energéticas e Nucleares - IPEN},
booktitle   = {Congresso Brasileiro de Engenharia e Ciência dos Materiais}
}