@inproceedings{inproceedingsa9e8c28a,
title   = {Piezoelectric stimulation of microcantilever beams for young's modulus determination of amorphous hydrogenated silicon carbide},
author = {Rehder, Gustavo Pamplona and Paez Carreño, Marcelo Nelson},
year = {2008},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}