@misc{misc521eda38, title = {Fabrication of nanochannels in SU-8 using AFM tip}, author = {Duarte, G. R. M. and Silva, Marcelo de Assumpção Pereira da and Carrilho, Emanuel}, year = {2009}, publisher = {LNLS}, journal = {Activity Report 2008: LNLS/Brazilian Synchrotron Light Laboratory} }