@article{article4325b9a2,
title   = {Hollow core ARROW waveguides fabricated with SiOxNy films deposited at low temperatures},
author = {Gollub, Alexandre Henrique and Carvalho, Daniel Orquiza de and Paiva, Thiago Costa de and Alayo Chávez, Marco Isaías},
year = {2010},
doi = {10.1002/pssc.200982889},
journal   = {Physica Status Solidi C}
}