@article{articlef77831c8,
title   = {Low cost ion implantation technique},
author = {Salvadori, M C and Teixeira, F S and Sgubin, L G and Araújo, W W R and Spirin, R E and Oks, E M and Yu, K M and Brown, I G},
year = {2012},
doi = {10.1063/1.4768699},
journal   = {Applied Physics Letters}
}