@inproceedings{inproceedings14cc05c4, title = {Production of hidrogenated amorphous silicon films frow a low frequency glow discharge}, author = {Fragalli, J. F. and Misoguti, L and Nakagaito, A. N. and Branz, H. and Grivickas, V. and Bagnato, Vanderlei Salvador}, year = {1992}, publisher = {UNICAMP}, booktitle = {Workshop on Crystalline and Amorphous Silicon and its Alloys} }