@article{articlec2ea21cf,
title   = {Reactive sputter magnetron reactor for preparation of thin films and simultaneous in situ structural study by X-ray diffraction},
author = {Buergi, J. and Neuenschwander, R. and Kellermann, G. and Garcia Molleja, J. and Feugeas, J. and Craievich, Aldo Felix},
year = {2013},
doi = {10.1063/1.4773002},
journal   = {REVIEW OF SCIENTIFIC INSTRUMENTS}
}