@article{articlef98fbbbb, title = {Low-energy dc ion source for low operating pressure}, author = {Oks, Efim and Shandrikov, Maxim and Brown, Ian and Salvadori, Maria CecĂ­lia Barbosa da Silveira}, year = {2014}, doi = {10.1063/1.4891697}, journal = {REVIEW OF SCIENTIFIC INSTRUMENTS} }