TY - JOUR TI - Properties of aluminum oxide thin film obtained by metal plasma immersion ion implantation and deposition after zirconium-based pretreatment PY - 2015 AU - Santos, Demetrio Jackson dos AU - Tavares, Lara Basilio AU - Antunes, Renato Altobelli AU - Droppa Jr., Roosevelt, AU - Silva, Tiago Fiorini da AU - Salvadori, Maria CecĂ­lia Barbosa da Silveira T2 - VACUUM DO - 10.1016/j.vacuum.2015.07.016 UR - https://doi.org/10.1016/j.vacuum.2015.07.016 PP - Oxford VL - 121 SP - 32-41 VL - no 2015 ER -